Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processing
TANAKA TSUTOMU (US)
NGUYEN CHAU (US)
PONNEKANTI HARI (US)
FAIRBAIRN KEVIN (US)
RAOUX SEBASTIEN (US)
- Priority:1999/07/15
- Grant:2002/03/12
TANAKA TSUTOMU (US)
NGUYEN CHAU (US)
PONNEKANTI HARI (US)
FAIRBAIRN KEVIN (US)
RAOUX SEBASTIEN (US)
FODOR MARK (US)
- JP-2001104825-A
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B03C3/40 (inventive, first)
B03C3/08 (inventive)
H01L21/205 (inventive)
B03C3/66 (inventive)
B03C3/14 (inventive)
C23C16/44 (inventive)
B03C3/09 (inventive)
B01D51/02 (inventive)
B01D49/00 (inventive)
B01J3/02 (inventive)
B01D49/00 (inventive)
B01D51/02 (inventive)
C23C16/4412 (inventive, first)
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