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Method of forming pattern of cured product as well as production methods for processed substrate, optical component, circuit board, electronic component, imprint mold and imprint pretreatment coating material

Patent
US-11597137-B2
Inventor

KATO JUN (JP)

HONMA TAKESHI (JP)

ITO TOSHIKI (JP)

TSUZUKI HIDETOSHI (JP)

Assignee
CANON KK (JP)
Country
United States
Dates
  • Priority:
    2016/04/08
  • Grant:
    2023/03/07
Description
This web page summarizes information in PubChem about patent US-11597137-B2. This includes chemicals mentioned, as reported by PubChem contributors, as well as other content, such as title, abstract, and International Patent Classification (IPC) codes. To read more about how this page was constructed, please visit the PubChem patents help page.

1 Abstract

Provided is a method of producing a cured product pattern, including: a first step (arranging step) of arranging a layer formed of a curable composition (α 1 ′) that is the components of the curable composition (α 1 ) except the component (D) serving as a solvent on a substrate; and a second step (applying step) of applying droplets of a curable composition (α 2 ) discretely onto the layer formed of the curable composition (α 1 ), the curable composition (α 1 ) having a number concentration of particles each having a particle diameter of 0.07 μm or more of less than 2,021 particles/mL, and the curable composition (α 1 ′) having a surface tension larger than that of the curable composition (α 2 ).

2 Full Text

3 Important Dates

3.1 Priority Date

2016/04/08

3.2 Filing Date

2018/10/03

3.3 Publication Date

2023/03/07

3.4 Grant Date

2023/03/07

4 Inventor

KATO JUN (JP)

HONMA TAKESHI (JP)

ITO TOSHIKI (JP)

TSUZUKI HIDETOSHI (JP)

5 Assignee

CANON KK (JP)

6 Country

United States

7 Patent Family

8 Classification

8.1 IPC

G03F7/16 (inventive)

B82Y10/00 (inventive)

B29C59/00 (inventive)

B29C59/16 (inventive, first)

H01L21/027 (inventive)

B82Y40/00 (inventive)

G03F7/00 (inventive)

G03F7/027 (inventive)

H01L21/02 (inventive)

B29K33/00

8.2 CPC

B82Y10/00

G03F7/0002 (inventive, first)

B29C59/16 (inventive, first)

B82Y40/00

G03F7/027 (inventive)

G03F7/168 (inventive)

G03F7/028 (inventive)

B29C59/002 (inventive)

B29C59/007 (inventive)

H01L21/0273 (inventive)

G03F7/004 (inventive)

B29K2033/12

H01L21/022 (inventive)

G03F7/161 (inventive)

B29C2791/005

H01L21/0274 (inventive)

9 Citations

10 Similar Patents

11 Information Sources

  1. Google Patents
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