Method of forming pattern of cured product as well as production methods for processed substrate, optical component, circuit board, electronic component, imprint mold and imprint pretreatment coating material
KATO JUN (JP)
HONMA TAKESHI (JP)
ITO TOSHIKI (JP)
TSUZUKI HIDETOSHI (JP)
- Priority:2016/04/08
- Grant:2023/03/07
KATO JUN (JP)
HONMA TAKESHI (JP)
ITO TOSHIKI (JP)
TSUZUKI HIDETOSHI (JP)
G03F7/16 (inventive)
B82Y10/00 (inventive)
B29C59/00 (inventive)
B29C59/16 (inventive, first)
H01L21/027 (inventive)
B82Y40/00 (inventive)
G03F7/00 (inventive)
G03F7/027 (inventive)
H01L21/02 (inventive)
B29K33/00
B82Y10/00
G03F7/0002 (inventive, first)
B29C59/16 (inventive, first)
B82Y40/00
G03F7/027 (inventive)
G03F7/168 (inventive)
G03F7/028 (inventive)
B29C59/002 (inventive)
B29C59/007 (inventive)
H01L21/0273 (inventive)
G03F7/004 (inventive)
B29K2033/12
H01L21/022 (inventive)
G03F7/161 (inventive)
B29C2791/005
H01L21/0274 (inventive)
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- PubChem