Ion generator and ion implanter
Patent
US-11107659-B2
Inventor
MUROOKA HIROKI (JP)
Assignee
SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD (JP)
Country
United States
Dates
- Priority:2019/07/16
- Grant:2021/08/31
Description
This web page summarizes information in PubChem about patent US-11107659-B2. This includes chemicals mentioned, as reported by PubChem contributors, as well as other content, such as title, abstract, and International Patent Classification (IPC) codes. To read more about how this page was constructed, please visit the PubChem patents help page.
There is provided an ion generator including a vapor generating chamber for generating a vapor by heating a raw material in which a first solid material which is a single substance of an impurity element and a second solid material which is a compound containing the impurity element are mixed with each other, and a plasma generating chamber for generating a plasma containing ions of the impurity element by using the vapor.
2019/07/16
2020/07/15
2021/08/31
2021/08/31
MUROOKA HIROKI (JP)
SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD (JP)
United States
H01J37/317 (inventive, first)
H01J37/08 (inventive)
H01J27/08 (inventive)
H01J37/3171 (inventive, first)
H01L21/265 (inventive)
H01J2237/006
H01J2237/082
H01J2237/31705
H01J2237/08
H01J37/08 (inventive, first)
- US-4898798-A (SEA)
- US-5808416-A (SEA)
- JP-2004359985-A (APP,SEA)
- US-2008047607-A1 (SEA)
- US-2008073559-A1 (SEA)
- JP-2010080429-A (APP,SEA)
- US-8253114-B2 (SEA)
- JP-2014003046-A (APP,SEA)
- US-9187832-B2 (SEA)
- WO-2016046939-A1 (APP,SEA)
- JP-2016522964-A (APP)
- US-10043635-B2 (SEA)
- Google PatentsLICENSE"Google Patents Research Data" by Google, based on data provided by IFI CLAIMS Patent Services and OntoChem, is licensed under a Creative Commons Attribution 4.0 International License.https://creativecommons.org/licenses/by/4.0/legalcode
- PubChem
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