An official website of the United States government

Ion generator and ion implanter

Patent
US-11107659-B2
Inventor
MUROOKA HIROKI (JP)
Assignee
SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD (JP)
Country
United States
Dates
  • Priority:
    2019/07/16
  • Grant:
    2021/08/31
Description
This web page summarizes information in PubChem about patent US-11107659-B2. This includes chemicals mentioned, as reported by PubChem contributors, as well as other content, such as title, abstract, and International Patent Classification (IPC) codes. To read more about how this page was constructed, please visit the PubChem patents help page.

1 Abstract

There is provided an ion generator including a vapor generating chamber for generating a vapor by heating a raw material in which a first solid material which is a single substance of an impurity element and a second solid material which is a compound containing the impurity element are mixed with each other, and a plasma generating chamber for generating a plasma containing ions of the impurity element by using the vapor.

2 Full Text

3 Important Dates

3.1 Priority Date

2019/07/16

3.2 Filing Date

2020/07/15

3.3 Publication Date

2021/08/31

3.4 Grant Date

2021/08/31

4 Inventor

MUROOKA HIROKI (JP)

5 Assignee

SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD (JP)

6 Country

United States

7 Linked Chemicals

7.1 PubChem Compounds

7.2 PubChem Substances

8 Patent Family

9 Classification

9.1 IPC

H01J37/317 (inventive, first)

H01J37/08 (inventive)

9.2 CPC

H01J27/08 (inventive)

H01J37/3171 (inventive, first)

H01L21/265 (inventive)

H01J2237/006

H01J2237/082

H01J2237/31705

H01J2237/08

H01J37/08 (inventive, first)

10 Citations

11 Similar Patents

12 Information Sources

  1. Google Patents
    LICENSE
    "Google Patents Research Data" by Google, based on data provided by IFI CLAIMS Patent Services and OntoChem, is licensed under a Creative Commons Attribution 4.0 International License.
    https://creativecommons.org/licenses/by/4.0/legalcode
  2. PubChem
CONTENTS