Systems and methods for workpiece processing using neutral atom beams
MATTSON TECH INC (US)
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD (CN)
- Priority:2018/08/06
- Grant:2022/02/15
MATTSON TECH INC (US)
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD (CN)
H01J37/305 (inventive)
H01J37/32 (inventive)
H01J27/14 (inventive)
H01L21/768 (inventive)
H01L21/26 (inventive, first)
H01J37/32422 (inventive, first)
H01J27/024 (inventive)
H01L21/76826 (inventive, first)
H01J37/3266 (inventive)
H01J37/3053 (inventive)
H01J2237/0041
H05H3/02
H01J27/14 (inventive)
H01J37/08 (inventive, first)
H01J37/32669 (inventive)
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- Google PatentsLICENSE"Google Patents Research Data" by Google, based on data provided by IFI CLAIMS Patent Services and OntoChem, is licensed under a Creative Commons Attribution 4.0 International License.https://creativecommons.org/licenses/by/4.0/legalcode
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