| abstract |
An excimer filling discharge vessel (3) comprises a base (5), electrodes (6, 7) and a filling with at least one inert gas and a halogen, which together form an excimer during operation of the lamp (1), the discharge vessel ( 3) is made of quartz glass. The inner wall of the discharge vessel (3) is completely coated with a passivation layer (15) of a metal oxide of the metals Al, Hf, Y or Sc or their mixed oxides, the layer (15) having an amorphous structure and its layer thickness being 20 to 200 nm. |